| FE-TEM (Tecnai G©÷ F30 S-TWIN) by FEI |
PARK YUN CHANG |
+82-42-879-9552 |
| FE-SEM(Sirion) with EDS by FEI |
HYUN MOON SEOP |
+82-42-879-9553 |
| Dual Beam FIB System (Nova 200) by FEI |
PARK KYUNG JIN |
+82-42-879-9554 |
| Ion Milling System (PIPS¢â) by Gatan |
YOO JUNG HO |
+82-42-879-9555 |
| Pt Coater (SCD005) by Baltec |
HYUN MOON SEOP |
+82-42-879-9553 |
| Scanning Probe Microscope (XE-100) by Park Systems |
HYUN MOON SEOP |
+82-42-879-9553 |
| Scanning Probe Microscope (Nanoman) by Veeco |
HYUN MOON SEOP |
+82-42-879-9553 |
| FT-IR Microscope (IFS66v/s & Hyperion3000) by Bruker |
HYUN MOON SEOP |
+82-42-879-9553 |
| NIR Imaging (MatrixNIR) by Spectral dimensions |
HYUN MOON SEOP |
+82-42-879-9553 |
| Nano Indentation System (Nano Indenter XP) by MTS |
HYUN MOON SEOP |
+82-42-879-9553 |
| Wafer Prober (4156C, 4284A) & Summit (1274B) by by Agilent & Cascade |
KOH JIN WON |
+82-42-879-9557 |
| Semicondutor Characterization System (4200 SCS/F) & Summit (11862B) by Keithley & Cascade |
KOH JIN WON |
+82-42-879-9557 |
| Auto Thickness Measurement System (SFX100) by KLA-Tencor |
SOUN WOO SIK |
+82-42-879-9551 |
| Spectroscopic Ellipsometer (M2000D) by Woollam |
SOUN WOO SIK |
+82-42-879-9551 |
| Spectroscopic Reflectometer (ST5000_Auto200) by K-MAC |
SOUN WOO SIK |
+82-42-879-9551 |
| Imaging Ellipsometer ( EP3_SE) by Nanofilm |
SOUN WOO SIK |
+82-42-879-9551 |
| Surface Profiler (Dektak-8) by Veeco |
SOUN WOO SIK |
+82-42-879-9551 |
| Optical Surface Profiler (m-Surf) by Nano Focus |
SOUN WOO SIK |
+82-42-879-9551 |
| Stress Gauge (FSM500TC) by FSM |
SOUN WOO SIK |
+82-42-879-9551 |
| 4-point Probe (CMT SR2000) by A.I.T. |
SOUN WOO SIK |
+82-42-879-9551 |
| FE-SEM(S-4800) by Hitachi |
HYUN MOON SEOP |
+82-42-879-9553 |
| Precision Etching Coating System (PECS¢â) by Gatan |
YOO JUNG HO |
+82-42-879-9555 |
| FE-TEM (JEM-2100F HR) by JEOL |
YOO JUNG HO |
+82-42-879-9555 |
| Process Control Monitoring System (4072A + UF3000 ) by Agilent + Accretech |
KOH JIN WON |
+82-42-879-9557 |
| Reactive Ion Etcher (RIE 10NR) by SAMCO |
KOH JIN WON |
+82-42-879-9557 |
| X-RAY (REVOLUTION) by X-TEK SYSTEMS LTD. |
KOH JIN WON |
+82-42-879-9557 |
| FE-STEM (HD-2300A ) by Hitachi |
SEO HYUN SANG |
+82-42-879-9732 |
| Dual Beam FIB system (Helios NanoLab¢â) by FEI |
PARK KYUNG JIN |
+82-42-879-9554 |
| Single Beam FIB system (FB-2100) by Hitachi |
PARK KYUNG JIN |
+82-42-879-9554 |
| Auto Stage Optical Microscope by Olympus, Japan |
KOH JIN WON |
+82-42-879-9557 |
| In-situ TEM (JEM-3011 HR) by JEOL |
YOO JUNG HO |
+82-42-879-9555 |
| Magnetic Sector SIMS (IMS 7f) by CAMECA |
|
+82-42-879-9559 |
| Cs-Corrected Scanning Transmission Electron Microscopy by JEOL |
PARK YUN CHANG |
+82-42-879-9552 |